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1、MEMS GAS SENSOR,COMPOSITION OF GAS SENSOR,CONTENTS,1、Introduction and Application 2、The classification and the principle of sensor 3、Processing and manufacturing sensor,INTRODUCTION AND APPLICATION,Gas detection in peoples production life applications is very extensive, especially in the aspects of
2、safety in production, such as, mine operation, gas production and transportation. Gas sensor is directly related to peoples life and property safety.,INTRODUCTION AND APPLICATION,Microelectromechanical systems (MEMS) technology is the micro device manufacturing method based on the development of mic
3、roelectronic technology, first in the accelerometer (加速度計), a pressure pickup (壓力傳感器) field. With the increase of film technology with Thin film technology (薄膜技術) development, in recent years the MEMS sensors have been widely concerned in the chemical gas detection.,INTRODUCTION AND APPLICATION,The
4、following are some of the gas sensor：,INTRODUCTION AND APPLICATION,MEMS gas sensor is compared with the traditional detection method, has the advantages of small size, high sensitivity, fast response, easy to integrate and many other advantages, is one of the main direction of the future development
5、 of gas sensors.,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,According to different detection theory can be divided into: 1、 based on the gas self photoacoustic spectroscopy and optical properties of MEMS gas sensor 2、Gas sensors sensitive materials based on adsorption principle 3、Gas sensor for
6、inflammable and explosive gas catalytic combustion 4、 Field Asymmetric Ion Mobility Spectrometry technology of gas sensor,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,1、 based on the gas self photoacoustic spectroscopy and optical properties of MEMS gas sensor：,Photoacoustic gas sensor consists of
7、 a modulated light source , photoacoustic cell , high sensitive microphone 3 main part of the system .,The principle of process：,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,1) light gas specific modulation frequency, the gas molecule in its excited state;,2) by gas molecules induced by impact way
8、 to release the absorbed energy;,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,The principle of process：,3) the heat effect generated gas collisions, gas heating expansion heat wave, its frequency and the same frequency modulation light;,4) high sensitive microphone sampling of the heat wave;,2、Gas
9、 sensors sensitive materials based on adsorption principle:,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,Surface acoustic wave (SAW) gas sensor is Bryant et al in 1981 for the first time put forward the SAW for gas sensitive research, and design the SAW gas sensor model of gas sensitive layer adso
10、rption. With the development of MEMS technology, the SAW gas sensor has been miniaturized, sensitivity, selectivity and other performance parameters have been improved.,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,The principle of process：,1) SAW generator vibration, the receiver receives the vibr
11、ation signal, and the phase sensitive detection circuit detection and accept the shock wave phase difference;,2) gas molecules attached to the film made of sensitive materials, conducting properties of materials change, phase two wave difference change.,The phase sensitive detection circuit,The prin
12、ciple of catalytic combustion type gas sensor from the gas sensor for methane, macro, CO and other inflammable and explosive gas detection.,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,3、 Gas sensor for inflammable and explosive gas catalytic combustion:,THE CLASSIFICATION AND THE PRINCIPLE OF SEN
13、SOR,The principle of process：,When there are flammable and explosive gases in the air, gas molecules in the catalytic oxidation reaction catalyst surface, and emit heat. The thermistor temperature change can be converted to electrical signals, and the reference film compared to get gas volume fracti
14、on changes.,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,4、 Field Asymmetric Ion Mobility Spectrometry technology of gas sensor,FAIMS technology is the technology of ion mobility spectrometry (IMS) based on the development of, gas sensor FAIMS technology can be used in many fields, such as atmosph
15、eric toxic gas detection based on, and has the feature of small volume accuracy.,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,The principle of process：,1) carrier gas mixed with the sample ionization after ion gate to the ion drift region,2) at high (greater than 11 000V / cm) under the effect of
16、alternating electric field, the migration velocity of different ions for nonlinear (nonlinear) changes, relevant, this change and ion characteristics therefore, ion high electric field can differentiate between low field mobility similar.,Alternating electric field to add a DC bias voltage, high ele
17、ctric field transfer effects offset detecting gas ions.,THE CLASSIFICATION AND THE PRINCIPLE OF SENSOR,The principle of process：,3) in the sample testing process to the DC bias voltage is analyzed in the sample gas composition of scanning.,PROCESSING AND MANUFACTURING SENSOR,In the processing of SAW
18、 gas sensor as an example,1) micromachined tuning fork,Processing method of machining micro fork is similar to the wishbone MEMS acceleration sensor, can adopt lithographic manner through the processing.,PROCESSING AND MANUFACTURING SENSOR,In the processing of SAW gas sensor as an example,2) thin films,Preparation of thin film by deposition will sensitive material ionized deposition on the substrate.,In the processing of SAW gas sensor as an example,PROCESSING AND MANUFACTURING SENSOR,3) package,In general, encapsulation of SAW gas sensor with MEMS device common.,THANK YOU!,
傳感器原理及應用(國外英文資料)
The sensor principle and the key word you query are: sensors
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Principle and application of sensors
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Test and control technology laboratory
Experiment a metal foil strain - single arm, half arm, full bridge performance experiment
Objective: to understand the strain effect of metal foil strain, single arm, half arm, full bridge working principle and performance.
Basic principle: the resistance wire under the action of external force mechanical deformation occurs, its resistance to change, this is the effect of resistance strain, describe the relation between the resistance strain effect is: Δ R/R=K epsilon type: Δ R/R for: Δ R/R resistance wire resistance relative changes,
For the strain sensitivity coefficient K and epsilon=Δ L/L for the resistance wire length relative changes,
metal foil strain gauge is through photolithography, strain sensor made of corrosion, etc, through its conversion unit under test stress state changes, the role of the bridge completed change the proportion of resistance to voltage, output voltage of bridge reflects the corresponding stress state. The wheatstone bridge output voltage U &western 1=Ek
/ 4. In the half bridge performance experiments and different loading direction of neighborhood, two strain gauge access bridge as a bridge to output sensitivity, the nonlinear improved. When the resistance strain gauge and dependent variable phase at the same time, the output voltage U &western 2=Ek bridge road
/ 2. In the whole bridge measurement circuit, the mechanical properties of the same two strain gauge bridge access to edge, different access adjacent si
光流傳感器英文資料
DescriptIon The ADNS-3080 is a high performance addiTIon to Avago Technologies’ popular ADNS family of opTIcal mouse sensors. The ADNS-3080 is based on a new， faster architecture with improved navigaTIon. The sensor is capable of sensing high speed mouse motion - up to 40 inches per second and acceleration up to 15g – for increased user precision and smoothness. The ADNS-3080 along with the ADNS-2120-001 trim lens， ADNS-2220-001 assembly clip and HLMP-EG3E-xxxxx led form a complete， compact optical mouse tracking system. There are no moving parts， which means high reliability and less maintenance for the end user. In addition， precision optical alignment is not required， facilitating high volume assembly. The sensor is programmed via registers through a four-wire serial port. It is packaged in a 20-pin staggered dual inline package （DIP）.
化學傳感器·傳感器技術（第10冊）：化學傳感器的應用（英文版）
出版時間：2013年版
內容簡介
Chemical sensors are integral to the automaoon of a my riad industrial processes， as well as everyciay monitoring of such activities as public safety， testing and monitoring， meclical therapeutics， and many more.The Chemical Sensors references books spans 6 volumes and covers in-depth details on both materials used for chemical sensors and their applications， with voiLmies I through 3 exploring the materials used for chemical sensors-their properties， their behavior， their composition， and even their manufacturing and fabrication. Volumcs 4 through 6 explore the great variety of applicarions for chemical sensors - from manufacturino and industry to biomedical uses.
目錄
1化學氣體混合物分析與電子鼻：現狀與未來發展趨勢
1引言
2氣體識別的現代方法
3電子鼻：方法與成就
4電子鼻中的信號處理
5電子鼻的制造
6電子鼻的優點
7影響電子鼻最佳運行的原因
8電子鼻的市場
9電子鼻的應用
10總結
11致謝
參考文獻
2電子舌：方法與成果
1引言
2測量原理
3信號處理
4應用
5應用中的注意事項
6商業化
7結論
8致謝
9術語
參考文獻
3無線化學傳感器
1無線傳感器：簡介
2無線化學傳感器
3致謝
參考文獻
4遠程化學傳感：應用于大氣監測
1引言
2大氣監測的技術與設備
3應用
4結論
參考文獻
5化學傳感器在我們生活中的應用
1引言
2生物醫學應用
3水質量檢驗
4食物質量檢驗
5環境控制
6家庭應用
7術語
參考文獻
6化學傳感器在工業、農業、交通運輸中的應用
1引 言
2汽車中的應用
3工業中的化學傳感器
4消防報警系統
5農業中的應用
6法律執行中的應用
7大氣與空間中的應用
8軍事上的應用
9術語
參考文獻
7化學傳感器的選擇與操作指南
1理想的化學傳感器什么樣？
2應用領域對理想傳感器設計的影響？
3不同應用的化學傳感器：選擇的決定因素？
4低靈敏度的傳感器有未來嗎？
5未來趨勢
6氣體傳感器選擇與使用中的一些建議
7總結
8致謝
參考文獻
索引
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